CON
Accurion nanofilm EP3se
Spectroscopic Nulling Imaging Elipsometer
UNG
APE Research A100
Atomic force microscope
UNG
Beam deflection spectrometry
System for determination of the thermo-optical property of solid samples
CON
DaLI
Direct laser lithography system
ELETTRA
DIENIER ZEPTO
PLASMA SYSTEM
CON
Dual Beam Helios Nanolab 650
Dual Beam FIB-SEM system
UNG
EKSPLA NT-342A
Time-of-flight photoconductivity setup
UNG
FormFactor EPS150-TRIAX
Probe station + 2 ch. multimeter
UNG
GATAN PECS
Coating system
UNG
Hewlett Packard HP 6890 with Gerstel MPS 2
GC-ECD/FID with Gerstel MPS 2 autosampler
ELETTRA
Jenoptik Mikrotechnik DEX 02
X-Ray Scanner
UNG
JEOL Cross-Section polisher
SEM sample preparation
UNG
JEOL JEM 2100F - UHR
TEM/STEM (+ EDX)
UNIVE
JEOL JEM-3010
TEM
UNG
JEOL JSM 7100F-TTLS
Field-emission SEM (+EDX,CL and heating stage)
UNIVE
LEICA UC6 FC6
CRYO ULTRAMICROTOME
UNG
miDALIX DALI model A
Laser optical lithography
UNG
Other facilities for microscopy sample preparation
Sample preparation
CNR-IOM
POLARON SC7620
SPUTTER COATER
UNIVE
POLARON SC7620
SPUTTER COATER
UNG
R3000 hemispherical electrons spectrometer
XPS facility
ELETTRA
SAXS beamline
CNR-IOM
SISTEC REACTIVE ION Etching
RIE
UNG
Thermal lens spectrometry/microscopy
Detection system with the possiblity of coupling to HPLC or IC
ELETTRA
TwinMic beamline
Soft X-ray Microscope
ELETTRA
UV-KUB 3
UV MASK ALIGNER
CON
Veeco Dimension 3100
AFM
CNR-IOM
ZEISS LEO 1540 XB
FIB and SEM
UNIVE
ZEISS SIGMA VP
SEM